Compliant MEMS integrate compliant mechanism design and microelectromechanical systems to create more reliable systems and devices.
Traditional rigid-body mechanisms transfer or transform motion, force, or energy by using rigid links connected at movable joints. Compliant mechanisms also transfer or transform motion, force, or energy. However, unlike rigid-link mechanisms, compliant mechanisms gain some or all of their mobility from the deflection of flexible members. Because compliant mechanisms use flexible members, many mechanisms can be fabricated from one piece of material, resulting in reduced part count, reduced wear, and higher precision due to the elimination of backlash. Due to MEMS fabrication processes, compliant mechanisms lend themselves well to the world of microelectromechanical systems and provide greater reliability for these devices.
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Bistable MEMS
Our research in MMDI specifically works with use of compliant bistable MEMS in autonomous microsystems. Bistable mechanisms are mechanisms that are stable in two positions. These mechanisms gain their bistable behavior from the energy stored in the flexible segments which deflect to allow mechanism motion. This means that when they are actuated, they "snap" from one equilibrium position to another.